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MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
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Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated and Calibrated
The MPX5500 series piezoresistive transducer is a state-of-the-art monolithic silicon pressure sensor designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D inputs. This patented, single element transducer combines advanced micromachining techniques, thin-film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure. Features * 2.5% Maximum Error over 0 to 85C * Ideally suited for Microprocessor or Microcontroller-Based Systems * Patented Silicon Shear Stress Strain Gauge * Durable Epoxy Unibody Element * Available in Differential and Gauge Configurations
VS
MPX5500 SERIES
INTEGRATED PRESSURE SENSOR 0 to 500 kPa (0 to 72.5 psi) 0.2 to 4.7 Volts Output
MPX5500D CASE 867
SENSING ELEMENT
THIN FILM TEMPERATURE COMPENSATION AND GAIN STAGE #1
GAIN STAGE #2 AND GROUND REFERENCE SHIFT CIRCUITRY
Vout
PINS 4, 5 AND 6 ARE NO CONNECTS GND
MPX5500DP CASE 867C
Figure 1. Fully Integrated Pressure Sensor Schematic PIN NUMBER
1 2 3 Vout Gnd VS 4 5 6 N/C N/C N/C
NOTE: Pins 4, 5, and 6 are internal device connections. Do not connect to external circuitry or ground. Pin 1 is noted by the notch in the lead.
REV 5
(c)Motorola Sensor Device Data Motorola, Inc. 2001
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MPX5500 SERIES
MAXIMUM RATINGS(1)
Parametrics Maximum Pressure(2) (P2 v 1 Atmosphere) Storage Temperature Operating Temperature Symbol P1max Tstg TA Value 2000 -40 to +125 -40 to +125 Unit kPa C C
NOTES: 1. Maximum Ratings apply to Case 867 only. Extended exposure at the specified limits may cause permanent damage or degradation to the device. 2. This sensor is designed for applications where P1 is always greater than, or equal to P2. P2 maximum is 500 kPa.
OPERATING CHARACTERISTICS (VS = 5.0 Vdc, TA = 25C unless otherwise noted, P1 > P2. Decoupling circuit shown in Figure 4 required to meet electrical specifications.)
Characteristic Pressure Range(1) Supply Voltage(2) Symbol POP VS Io (0 to 85C) (0 to 85C) (0 to 85C) Voff VFSO VFSS -- V/P Time(7) tR Io+ -- Min 0 4.75 -- 0.088 4.587 -- -- -- -- -- -- Typ -- 5.0 7.0 0.20 4.70 4.50 -- 9.0 1.0 0.1 20 Max 500 5.25 10.0 0.313 4.813 -- "2.5 -- -- -- -- Unit kPa Vdc mAdc Vdc Vdc Vdc %VFSS mV/kPa ms mAdc ms
Supply Current Zero Pressure Offset(3)
Full Scale Output(4) Full Scale Span(5) Accuracy(6) Sensitivity Response
Output Source Current at Full Scale Output Warm-Up Time(8)
NOTES: 1. 1.0kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. 3. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 4. Full Scale Output (VFSO) is defined as the output voltage at full rated pressure. 5. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 6. Accuracy (error budget) consists of the following: * Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. * Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. * Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum or maximum rated pressure at 25C. * TcSpan: Output deviation over the temperature range of 0 to 85C, relative to 25C. * TcOffset: Output deviation with minimum pressure applied, over the temperature range of 0 to 85C, relative to 25C. * Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS at 25C. 7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 8. Warm-up Time is defined as the time required for the device to meet the specified output voltage after the pressure has been stabilized.
MECHANICAL CHARACTERISTICS
Characteristics Weight, Basic Element (Case 867) Typ 4.0 Unit grams
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Motorola Sensor Device Data
MPX5500 SERIES
Figure 3 illustrates the Differential/Gauge basic chip carrier (Case 867). A fluorosilicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the sensor diaphragm. (For use of the MPX5500D in a high pressure, cyclic application, consult the factory.) The MPX5500 series pressure sensor operating characteristics, and internal reliability and qualification tests are based on use of dry air as the pressure media. Media, other than dry air, may have adverse effects on sensor performance and long-term reliability. Contact the factory for information regarding media compatibility in your application. Figure 2 shows the sensor output signal relative to pressure input. Typical, minimum, and maximum output curves are shown for operation over a temperature range of 0 to 85C using the decoupling circuit shown in Figure 4. The output will saturate outside of the specified pressure range. Figure 4 shows the recommended decoupling circuit for interfacing the output of the integrated sensor to the A/D input of a microprocessor or microcontroller. Proper decoupling of the power supply is recommended.
5.0
OUTPUT (V)
TRANSFER FUNCTION: 4.5 Vout = VS*(0.0018*P+0.04) ERROR 4.0 VS = 5.0 Vdc TEMP = 0 to 85C 3.5 3.0 2.5 2.0 1.5 1.0 0.5 0 0 50 100 150 200 250 300 350 400 DIFFERENTIAL PRESSURE (kPa) 450 500 550 MAX MIN TYPICAL
Figure 2. Output versus Pressure Differential
FLUORO SILICONE DIE COAT DIE WIRE BOND
+5 V
STAINLESS STEEL METAL COVER P1 Vout Vs IPS 1.0 mF 0.01 mF GND 470 pF OUTPUT
LEAD FRAME
Motorola Sensor Device Data
EEEEEEEEEEEE EEEEEEEEEEEE EEEEEEEEEEEE EEEEEEEEEEEE EEEEEEEEEEEE
P2 EPOXY CASE
RTV DIE BOND
Figure 3. Cross-Sectional Diagram (Not to Scale)
Figure 4. Recommended power supply decoupling and output filtering. For additional output filtering, please refer to Application Note AN1646.
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MPX5500 SERIES PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Motorola designates the two sides of the pressure sensor as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing fluorosilicone gel which protects the die from the environment. The Motorola MPX pressure sensor is designed to operate with positive differential pressure applied, P1 > P2. The Pressure (P1) side may be identified by using the Table below:
Pressure (P1) Side Identifier Stainless Steel Cap Side with Part Marking
Part Number MPX5500D MPX5500DP
Case Type 867 867C
ORDERING INFORMATION
MPX Series Device Name Basic Element Ported Elements Differential Differential Dual Ports Options Case Type 867 867C Order Number MPX5500D MPX5500DP Device Marking MPX5500D MPX5500DP
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Motorola Sensor Device Data
MPX5500 SERIES PACKAGE DIMENSIONS
C R M B -A- N
PIN 1 SEATING PLANE
1 2 3 4 5 6
POSITIVE PRESSURE (P1)
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION -A- IS INCLUSIVE OF THE MOLD STOP RING. MOLD STOP RING NOT TO EXCEED 16.00 (0.630). DIM A B C D F G J L M N R S OPEN GROUND +VOUT +VSUPPLY -VOUT OPEN INCHES MIN MAX 0.595 0.630 0.514 0.534 0.200 0.220 0.027 0.033 0.048 0.064 0.100 BSC 0.014 0.016 0.695 0.725 30 _NOM 0.475 0.495 0.430 0.450 0.090 0.105 MILLIMETERS MIN MAX 15.11 16.00 13.06 13.56 5.08 5.59 0.68 0.84 1.22 1.63 2.54 BSC 0.36 0.40 17.65 18.42 30 _NOM 12.07 12.57 10.92 11.43 2.29 2.66
L
-T- G F D 6 PL 0.136 (0.005)
M
J S
TA
M
STYLE 1: PIN 1. 2. 3. 4. 5. 6.
VOUT GROUND VCC V1 V2 VEX
STYLE 2: PIN 1. 2. 3. 4. 5. 6.
OPEN GROUND -VOUT VSUPPLY +VOUT OPEN
STYLE 3: PIN 1. 2. 3. 4. 5. 6.
CASE 867-08 ISSUE N
BASIC ELEMENT
P 0.25 (0.010) X R
PORT #1 POSITIVE PRESSURE (P1) PORT #2 VACUUM (P2)
M
TQ
M
-A- U W L V
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. DIM A B C D F G J K L N P Q R S U V W X INCHES MIN MAX 1.145 1.175 0.685 0.715 0.405 0.435 0.027 0.033 0.048 0.064 0.100 BSC 0.014 0.016 0.695 0.725 0.290 0.300 0.420 0.440 0.153 0.159 0.153 0.159 0.063 0.083 0.220 0.240 0.910 BSC 0.182 0.194 0.310 0.330 0.248 0.278 STYLE 1: PIN 1. 2. 3. 4. 5. 6. MILLIMETERS MIN MAX 29.08 29.85 17.40 18.16 10.29 11.05 0.68 0.84 1.22 1.63 2.54 BSC 0.36 0.41 17.65 18.42 7.37 7.62 10.67 11.18 3.89 4.04 3.89 4.04 1.60 2.11 5.59 6.10 23.11 BSC 4.62 4.93 7.87 8.38 6.30 7.06
PORT #2 VACUUM (P2)
N
PORT #1 POSITIVE PRESSURE (P1)
-Q- B
PIN 1
1
2
3
4
5
6
K S
C
SEATING PLANE
-T-
-T- J
SEATING PLANE
G F
D 6 PL 0.13 (0.005)
M
A
M
CASE 867C-05 ISSUE F
PRESSURE AND VACUUM SIDES PORTED (DP)
VOUT GROUND VCC V1 V2 VEX
Motorola Sensor Device Data
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MPX5500 SERIES
Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. "Typical" parameters which may be provided in Motorola data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including "Typicals" must be validated for each customer application by customer's technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury or death may occur. Should Buyer purchase or use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Motorola was negligent regarding the design or manufacture of the part. Motorola and are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer.
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JAPAN: Motorola Japan Ltd.; SPS, Technical Information Center, 3-20-1, Minami-Azabu. Minato-ku, Tokyo 106-8573 Japan. 81-3-3440-3569 ASIA/PACIFIC: Motorola Semiconductors H.K. Ltd.; Silicon Harbour Centre, 2, Dai King Street, Tai Po Industrial Estate, Tai Po, N.T., Hong Kong. 852-26668334
HOME PAGE: http://www.motorola.com/semiconductors/
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Motorola Sensor Device Data
MPX5500/D

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